Description
Non-destructive testing is becoming more and more important in the semiconductor industry, requiring an X-ray source capable of producing images with high resolution and at high speed. Canon has developed micro-focus X-ray sources capable of achieving resolution of 2 μm at 6 watts and 4 μm at 10 watts power, making them useful in applications such as X-ray microscopy, X-ray computed tomography and off-line non-destructive inspection.
